Advanced Optical Inspection with ICOS™ T3/T7 Series
KLA’s ICOS™ T3/T7 Series offers advanced options for fully automated optical inspection of packaged integrated circuit (IC) components, whether they come in trays (T3) or tapes (T7) output. These systems are designed to provide heightened sensitivity to small defect types while ensuring accurate and repeatable 3D metrology measurements, crucial for detecting issues that could impact the final package quality. By incorporating Artificial Intelligence (AI) systems with deep learning algorithms, the ICOS T3/T7 Series can smartly categorize different defect types, aiding in efficient and precise component sorting.
Comprehensive Inspection Capabilities with ICOS™ T890XP
The ICOS™ T890XP component inspector from KLA sets a high standard for packaged IC and singulated substrate inspection and metrology systems. This tool offers fully automated optical inspection for a wide range of IC components, ensuring accurate and repeatable 3D metrology measurements along with advanced visual inspection (AVI) capabilities that cover all six sides of a component for comprehensive defect detection. By enabling parallel operation of four independent inspection stations and a component sorting station, the ICOS T890XP achieves high throughput and cost-effective component inspection.