Overview of KLA YieldStar In Situ Process Management
KLA's revolutionary product, the YieldStar In Situ Process Management, is a game-changer in the realm of chip manufacturing. This cutting-edge solution offers semiconductor process equipment manufacturers, chip manufacturers, and reticle manufacturers a comprehensive portfolio of SensArray® products. These products enable the in situ monitoring of process tools' environments and wafer handling conditions, providing vital information to visualize, diagnose, and control process and wafer handling conditions.
SensArray Automation for Enhanced Productivity
The SensArray Automation package is a key component of KLA's In Situ Process Management offering. This package provides fast and automated collection of process tool chamber temperature measurements, supporting fab startups with its semi-automated functionality. It includes the AS1000 automation base station, compatible with all 300mm wireless SensArray products, along with other essential components. By leveraging SensArray Automation, semiconductor manufacturers can enhance productivity, improve the availability of process tools, optimize the use of engineering resources, and centralize data storage in the fab’s MES database.
Specialized Monitoring Systems for Different Processes
The EtchTemp series, HighTemp-400, CryoTemp™, and WetTemp series are specialized monitoring systems within KLA's In Situ Process Management arsenal, tailored to specific process requirements. The EtchTemp series focuses on plasma etch wafer temperature measurements, while HighTemp-400 is designed for elevated temperature processes. The CryoTemp™ system supports monitoring of dry etch processes, and the WetTemp series is dedicated to wet processing wafer temperature measurements. These systems provide critical insights and data to support process engineers in optimizing their respective processes and enhancing overall productivity.
Advanced Wafer Handling Monitoring with Smartwafer™ and Others
In addition to process monitoring, KLA's In Situ Process Management includes advanced wafer handling monitoring solutions like the Smartwafer2™, EWG Wafer™, and RH Wafer™. The Smartwafer2™ handling monitor records vibrations and acceleration throughout the wafer handling system, pinpointing issues that could lead to defects or scratches on wafers. The EWG Wafer™ measures wobbling and eccentricity of wafers on spinning chucks without the need to open the tool chamber, streamlining the measurement process. Similarly, RH Wafer™ is designed to measure relative humidity in multiple locations, ensuring optimal process conditions for chip manufacturing. These advanced monitoring solutions play a crucial role in maintaining the efficiency and quality of wafer handling processes.